Inventor
PARK TAE-SIN
KR6 patents
Patents
6 patentsUS6239859B1May 29, 2001
Photolithographic apparatus composed of coater/developer and a plurality of steppers in parallel connected thereto
SAMSUNG ELECTRONICS CO LTD9 citations70
US6436609B1Aug 20, 2002
Photolithographic apparatus composed of coater/developer and a plurality of steppers in parallel connected thereto
SAMSUNG ELECTRONICS CO LTD5 citations59
US6934006B2Aug 23, 2005
Exposure apparatus and exposure method for use in forming a pattern of a semiconductor device
SAMSUNG ELECTRONICS CO LTD3 citations58
US6786970B2Sep 7, 2004
Equipment for fabricating a semiconductor product
SAMSUNG ELECTRONICS CO LTD2 citations55
US6042649AMar 28, 2000
Polyimide coating device having a polyimide supply status sensing device
SAMSUNG ELECTRONICS CO LTD5 citations53
US6774055B2Aug 10, 2004
In-line system having overlay accuracy measurement function and method for the same
SAMSUNG ELECTRONICS CO LTD0 citations50