Inventor
WALLACE JAY R
US13 patents
⚠️ This page may combine multiple inventors who share the name “WALLACE JAY R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS11495430B2Nov 8, 2022
Tunable extraction assembly for wide angle ion beam
APPLIED MATERIALS INC0 citations62
US11361935B2Jun 14, 2022
Apparatus and system including high angle extraction optics
APPLIED MATERIALS INC0 citations62
US11948781B2Apr 2, 2024
Apparatus and system including high angle extraction optics
APPLIED MATERIALS INC0 citations59
US12106943B2Oct 1, 2024
Substrate halo arrangement for improved process uniformity
APPLIED MATERIALS INC0 citations50
US12191117B2Jan 7, 2025
Compact low angle ion beam extraction assembly and processing apparatus
APPLIED MATERIALS INC0 citations46
WALLACE JAY R
3 patentsUS8303716B2Nov 6, 2012
High throughput processing system for chemical treatment and thermal treatment and method of operating
WALLACE JAY R12 citations82
US8323410B2Dec 4, 2012
High throughput chemical treatment system and method of operating
WALLACE JAY R4 citations60
US8287688B2Oct 16, 2012
Substrate support for high throughput chemical treatment system
WALLACE JAY R5 citations60