Inventor
DE JONGH ROBERTUS JOHANNES MAR
NL3 patents
Patents
3 patentsUS7307262B2Dec 11, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations54
US6992752B2Jan 31, 2006
Lithographic projection apparatus, computer program for control thereof, and device manufacturing method
ASML NETHERLANDS BV5 citations54
US7224428B2May 29, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations33