Inventor
HAMELIN THOMAS
US15 patents
⚠️ This page may combine multiple inventors who share the name “HAMELIN THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS7651583B2Jan 26, 2010
Processing system and method for treating a substrate
TOKYO ELECTRON LTD558 citations97
US6951821B2Oct 4, 2005
Processing system and method for chemically treating a substrate
TOKYO ELECTRON LTD306 citations97
US7079760B2Jul 18, 2006
Processing system and method for thermally treating a substrate
TOKYO ELECTRON LTD61 citations94
US7029536B2Apr 18, 2006
Processing system and method for treating a substrate
TOKYO ELECTRON LTD49 citations94
US7214274B2May 8, 2007
Method and apparatus for thermally insulating adjacent temperature controlled processing chambers
TOKYO ELECTRON LTD22 citations92
US7462564B2Dec 9, 2008
Processing system and method for treating a substrate
TOKYO ELECTRON LTD18 citations91
US8007591B2Aug 30, 2011
Substrate holder having a fluid gap and method of fabricating the substrate holder
TOKYO ELECTRON LTD13 citations83
US7964058B2Jun 21, 2011
Processing system and method for chemically treating a substrate
TOKYO ELECTRON LTD13 citations83
US8034176B2Oct 11, 2011
Gas distribution system for a post-etch treatment system
TOKYO ELECTRON LTD9 citations82
US6992892B2Jan 31, 2006
Method and apparatus for efficient temperature control using a contact volume
TOKYO ELECTRON LTD1 citations51