Inventor
WASAI YOKO
JP6 patents
Patents
6 patentsUS7688446B2Mar 30, 2010
Sample analyzing method, sample analyzing apparatus, manufacturing method of organic EL element, manufacturing equipment, and recording medium
HORIBA LTD8 citations81
US7196793B2Mar 27, 2007
Method for analyzing thin-film layer structure using spectroscopic ellipsometer
HORIBA LTD14 citations81
US7280210B2Oct 9, 2007
Measuring method, analyzing method, measuring apparatus, analyzing apparatus, ellipsometer, and computer program
HORIBA LTD7 citations71
US8013997B2Sep 6, 2011
Sample analyzing method, sample analyzing apparatus, manufacturing method of organic EL element, manufacturing equipment, and recording medium
HORIBA LTD2 citations60
US7271901B2Sep 18, 2007
Thin-film characteristic measuring method using spectroellipsometer
HORIBA LTD5 citations60
US7167242B2Jan 23, 2007
Sample analysis method
HORIBA LTD4 citations57