Inventor
KASSEL ELYAKIM
IL4 patents
⚠️ This page may combine multiple inventors who share the name “KASSEL ELYAKIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
3 patentsUS7804994B2Sep 28, 2010
Overlay metrology and control method
KLA TENCOR TECH CORP54 citations92
US7671990B1Mar 2, 2010
Cross hatched metrology marks and associated method of use
KLA TENCOR TECH CORP40 citations91
US7925486B2Apr 12, 2011
Computer-implemented methods, carrier media, and systems for creating a metrology target structure design for a reticle layout
KLA TENCOR TECH CORP16 citations79