Inventor

EGLEY FRED

US3 patents

⚠️ This page may combine multiple inventors who share the name “EGLEY FRED”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US11901944B2Feb 13, 2024

Power and data transmission to substrate support in plasma chambers via optical fiber

LAM RES CORP0 citations43

US10509425B2Dec 17, 2019

Virtual metrology method for ESC temperature estimation using thermal control elements

LAM RES CORP0 citations32

LONG MAOLIN

1 patent

US8742666B2Jun 3, 2014

Radio frequency (RF) power filters and plasma processing systems including RF power filters

LONG MAOLIN0 citations33