Inventor

RUEGER NEAL R

US56 patents

⚠️ This page may combine multiple inventors who share the name “RUEGER NEAL R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RUEGER NEAL R

MICRON TECHNOLOGY INC

Multiple spacer steps for pitch multiplication

Integrated circuit inspection system

Method and structure for shallow trench isolation during integrated circuit device manufacture

Method and system for discretely controllable plasma processing

Methods of incorporating nitrogen into silicon-oxide-containing layers

Deposition and chamber treatment methods

Multiple spacer steps for pitch multiplication

Plasma and electron beam etching device and method

Method for positioning spacers in pitch multiplication

Method for positioning spacers in pitch multiplication

Electron beam etching device and method

Profiling solid state samples

Electronic beam processing device and method using carbon nanotube emitter

Methods of forming transistors

Sensor and transducer devices comprising carbon nanotubes, methods of making and using the same

Protection in integrated circuits

Transistor structures

Methods of forming a nitrogen enriched region

Plasma processing, deposition, and ALD methods

System and method for detecting flow in a mass flow controller

Methods of forming semiconductor constructions

Transistor structures, methods of incorporating nitrogen into silicon-oxide-containing layers; and methods of forming transistors

System and method for detecting flow in a mass flow controller

Method and system for monitoring plasma using optical emission spectroscopy

Methods and apparatuses for energetic neutral flux generation for processing a substrate

Device for controlling placement of nanoparticles

Methods of forming plasma-generating structures; methods of plasma-assisted etching, and methods of plasma-assisted deposition

Protection in integrated circuits

Plasma processing, deposition and ALD methods

Methods of filling gaps using high density plasma chemical vapor deposition

System and method for detecting flow in a mass flow controller

Atomic layer deposition using electron bombardment

Methods of filling gaps and methods of depositing materials using high density plasma chemical vapor deposition

Gas delivery system for deposition processes, and methods of using same

Cleaning efficiency improvement in a high density plasma process chamber using thermally hot gas

Profiling solid state samples

Device for positioning nanoparticles

Field emission devices and methods for making the same

Integrated circuit inspection system

RUEGER NEAL R

Methods and apparatuses for energetic neutral flux generation for processing a substrate

Profiling solid state samples

Devices comprising nanotubes for use as sensors and/or transducers, and related methods

Electron beam processing device and method using carbon nanotube emitter

Devices comprising nanotubes or nanowires having alterable characteristics and related methods

Field emission devices and methods for making the same

Plasma-generating structures and display devices

Plasma-generating structures, display devices, and methods of forming plasma-generating structures

SANT SANKET

Method for positioning spacers in pitch multiplication

Method for positioning spacers for pitch multiplication

SANDHU GURTEJ S

Method of forming a nitrogen-enriched region within silicon-oxide-containing masses