Inventor
NAKAYAMA HISAKAZU
JP5 patents
⚠️ This page may combine multiple inventors who share the name “NAKAYAMA HISAKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS6654668B1Nov 25, 2003
Processing apparatus, processing system, distinguishing method, and detecting method
TOKYO ELECTRON LTD36 citations91
US7868270B2Jan 11, 2011
Temperature control for performing heat process in coating/developing system for resist film
TOKYO ELECTRON LTD7 citations82
US10422551B2Sep 24, 2019
Substrate liquid processing apparatus, and control method of heater unit
TOKYO ELECTRON LTD3 citations67
US7755003B2Jul 13, 2010
Temperature control for performing heat process on resist film
TOKYO ELECTRON LTD5 citations61