Inventor
DAUCH ELIZABETH A
US4 patents
Patents
4 patentsUS7253092B2Aug 7, 2007
Tungsten plug corrosion prevention method using water
NEC ELECTRONICS AMERICA INC3 citations59
US7052992B2May 30, 2006
Tungsten plug corrosion prevention method using ionized air
NEC ELECTRONICS AMERICA INC3 citations59
US6977215B2Dec 20, 2005
Tungsten plug corrosion prevention method using gas sparged water
NEC ELECTRONICS AMERICA INC3 citations59
US7507664B2Mar 24, 2009
Tungsten plug corrosion prevention method using ionized air
NEC ELECTRONICS AMERICA INC0 citations48