Inventor
BOUMEN ROEL
NL3 patents
Patents
3 patentsUS7195407B2Mar 27, 2007
Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing, cell and computer program
ASML NETHERLANDS BV10 citations80
US7068351B2Jun 27, 2006
Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing cell, and computer program
ASML NETHERLANDS BV8 citations70
US7184849B2Feb 27, 2007
Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus, lithographic processing cell and computer program
ASML NETHERLANDS BV7 citations66