Inventor

TAKESAWA YOICHI

JP3 patents

Patents

3 patents

US6717677B2Apr 6, 2004

Film defect inspection method for a film formed on a substrate

SHARP KK0 citations49

US7346290B2Mar 18, 2008

Cleaning apparatus for a rotatable member

SHARP KK0 citations46

US7245847B2Jul 17, 2007

Cleaning apparatus for a rotatable brush

SHARP KK0 citations46