Inventor
CHANDRASEKARAN NAGASUBRAMANIYAN
US3 patents
Patents
3 patentsUS7988529B2Aug 2, 2011
Methods and tools for controlling the removal of material from microfeature workpieces
MICRON TECHNOLOGY INC2 citations57
US7527545B2May 5, 2009
Methods and tools for controlling the removal of material from microfeature workpieces
MICRON TECHNOLOGY INC0 citations46
US12237189B2Feb 25, 2025
Wafer storage devices configured to measure physical properties of wafers stored therein
MICRON TECHNOLOGY INC0 citations42