Inventor · disambiguated record
Marc Sworowski
Also filed as: SWOROWSKI MARC
3 granted patents·1 pending application·18 citations·filing 2007–2022
63Inventor score
Top patents by PatentIndex Score
4 records- 0182US7982558B2Integrated single-crystal MEMS deviceNXP BV·Filed 2007·Granted Jul 19, 2011·13 cites·10 claims
- 0265US7839239B2MEMS resonator having at least one resonator mode shapeNXP BV·Filed 2007·Granted Nov 23, 2010·5 cites·12 claims
- 0348US2024262680A1Method for controlling a microelectromechanical systemSILMACH·Filed 2022·Application pending·0 cites
- 0447US11946741B2Mems sensor for sensing deformation by breaking contact between two electrodesSILMACH·Filed 2020·Granted Apr 2, 2024·0 cites·17 claims
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