Inventor

MEIJER JAN ANDRIES

NL4 patents

⚠️ This page may combine multiple inventors who share the name “MEIJER JAN ANDRIES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MAPPER LITHOGRAPHY IP BV

2 patents

US9665014B2May 30, 2017

Charged particle lithography system with alignment sensor and beam measurement sensor

MAPPER LITHOGRAPHY IP BV2 citations70

US9240306B2Jan 19, 2016

Device for spot size measurement at wafer level using a knife edge and a method for manufacturing such a device

MAPPER LITHOGRAPHY IP BV0 citations41

ASML NETHERLANDS BV

1 patent

USRE49732ENov 21, 2023

Charged particle lithography system with alignment sensor and beam measurement sensor

ASML NETHERLANDS BV0 citations59

MEIJER JAN ANDRIES

1 patent

US9030675B2May 12, 2015

Method for determining a distance between two beamlets in a multi-beamlet exposure apparatus

MEIJER JAN ANDRIES3 citations49