Inventor
JO JIN KYUNG
KR9 patents
Patents
9 patentsUS11028321B2Jun 8, 2021
Etching composition, method for etching insulating layer of semiconductor devices and method for preparing semiconductor devices
SK INNOVATION CO LTD0 citations61
US12116520B2Oct 15, 2024
Composition for etching, method for etching insulator and method for manufacturing semiconductor device, and novel compounds
SK INNOVATION CO LTD0 citations60
US11365350B2Jun 21, 2022
Silane compound
SK INNOVATION CO LTD0 citations60
US11236116B2Feb 1, 2022
Silicon compound
SK INNOVATION CO LTD0 citations60
US11066601B2Jul 20, 2021
Composition for etching, method for etching insulator and method for manufacturing semiconductor device, and novel compounds
SK INNOVATION CO LTD0 citations60
US10941341B2Mar 9, 2021
Etching composition additive, method for preparing the same and etching composition comprising the same
SK INNOVATION CO LTD0 citations60
US10836962B2Nov 17, 2020
Etchant composition, method of etching insulating film, method of manufacturing semiconductor device, and silane compound
SK INNOVATION CO LTD1 citations60
US12146092B2Nov 19, 2024
Etching composition, method for etching insulating film of semiconductor devices using the same and method for preparing semiconductor devices
SK INNOVATION CO LTD0 citations58
US11186772B2Nov 30, 2021
Etching composition, method for etching insulating film of semiconductor devices using the same and method for preparing semiconductor devices
SK INNOVATION CO LTD0 citations58