Inventor
UZOH CYPRIAN
US47 patents
⚠️ This page may combine multiple inventors who share the name “UZOH CYPRIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUTOOL INC
13 patentsUS6497800B1Dec 24, 2002
Device providing electrical contact to the surface of a semiconductor workpiece during metal plating
NUTOOL INC144 citations99
US6413388B1Jul 2, 2002
Pad designs and structures for a versatile materials processing apparatus
NUTOOL INC191 citations99
US6352623B1Mar 5, 2002
Vertically configured chamber used for multiple processes
NUTOOL INC131 citations98
US6482307B2Nov 19, 2002
Method of and apparatus for making electrical contact to wafer surface for full-face electroplating or electropolishing
NUTOOL INC126 citations97
US6413403B1Jul 2, 2002
Method and apparatus employing pad designs and structures with improved fluid distribution
NUTOOL INC93 citations97
US6610190B2Aug 26, 2003
Method and apparatus for electrodeposition of uniform film with minimal edge exclusion on substrate
NUTOOL INC65 citations96
US6478936B1Nov 12, 2002
Anode assembly for plating and planarizing a conductive layer
NUTOOL INC46 citations96
US6612915B1Sep 2, 2003
Work piece carrier head for plating and polishing
NUTOOL INC74 citations94
US6815354B2Nov 9, 2004
Method and structure for thru-mask contact electrodeposition
NUTOOL INC20 citations93
US6582579B1Jun 24, 2003
Methods for repairing defects on a semiconductor substrate
NUTOOL INC34 citations93
US6852208B2Feb 8, 2005
Method and apparatus for full surface electrotreating of a wafer
NUTOOL INC20 citations91
US6773576B2Aug 10, 2004
Anode assembly for plating and planarizing a conductive layer
NUTOOL INC5 citations73
US6932896B2Aug 23, 2005
Method and apparatus for avoiding particle accumulation in electrodeposition
NUTOOL INC2 citations63
TESSERA INC
8 patentsUS9318385B2Apr 19, 2016
Systems and methods for producing flat surfaces in interconnect structures
TESSERA INC12 citations93
US9123703B2Sep 1, 2015
Systems and methods for producing flat surfaces in interconnect structures
TESSERA INC11 citations89
US9560773B2Jan 31, 2017
Electrical barrier layers
TESSERA INC2 citations73
US10199275B2Feb 5, 2019
Systems and methods for producing flat surfaces in interconnect structures
TESSERA INC0 citations52
US9812360B2Nov 7, 2017
Systems and methods for producing flat surfaces in interconnect structures
TESSERA INC0 citations52
US9558998B2Jan 31, 2017
Systems and methods for producing flat surfaces in interconnect structures
TESSERA INC0 citations52
US9287164B2Mar 15, 2016
Single exposure in multi-damascene process
TESSERA INC1 citations52
US9245670B2Jan 26, 2016
Reliable wire method
TESSERA INC0 citations52
NOVELLUS SYSTEMS INC
8 patentsUS7491308B2Feb 17, 2009
Method of making rolling electrical contact to wafer front surface
NOVELLUS SYSTEMS INC18 citations93
US7329335B2Feb 12, 2008
Device providing electrical contact to the surface of a semiconductor workpiece during processing
NOVELLUS SYSTEMS INC11 citations93
US7378004B2May 27, 2008
Pad designs and structures for a versatile materials processing apparatus
NOVELLUS SYSTEMS INC5 citations74
US7311811B2Dec 25, 2007
Device providing electrical contact to the surface of a semiconductor workpiece during processing
NOVELLUS SYSTEMS INC5 citations74
US7309413B2Dec 18, 2007
Providing electrical contact to the surface of a semiconductor workpiece during processing
NOVELLUS SYSTEMS INC5 citations74
US7282124B2Oct 16, 2007
Device providing electrical contact to the surface of a semiconductor workpiece during processing
NOVELLUS SYSTEMS INC6 citations74
US7476304B2Jan 13, 2009
Apparatus for processing surface of workpiece with small electrodes and surface contacts
NOVELLUS SYSTEMS INC2 citations61
US7201829B2Apr 10, 2007
Mask plate design
NOVELLUS SYSTEMS INC5 citations61
ASM NUTOOL INC
6 patentsUS6942780B2Sep 13, 2005
Method and apparatus for processing a substrate with minimal edge exclusion
ASM NUTOOL INC45 citations96
US6852630B2Feb 8, 2005
Electroetching process and system
ASM NUTOOL INC73 citations96
US6943112B2Sep 13, 2005
Defect-free thin and planar film processing
ASM NUTOOL INC22 citations93
US6974769B2Dec 13, 2005
Conductive structure fabrication process using novel layered structure and conductive structure fabricated thereby for use in multi-level metallization
ASM NUTOOL INC42 citations92
US6969456B2Nov 29, 2005
Method of using vertically configured chamber used for multiple processes
ASM NUTOOL INC2 citations62
US6884334B2Apr 26, 2005
Vertically configured chamber used for multiple processes
ASM NUTOOL INC3 citations60
UZOH CYPRIAN
6 patentsUS8728934B2May 20, 2014
Systems and methods for producing flat surfaces in interconnect structures
UZOH CYPRIAN11 citations92
US9125333B2Sep 1, 2015
Electrical barrier layers
UZOH CYPRIAN6 citations84
US8609540B2Dec 17, 2013
Reliable packaging and interconnect structures
UZOH CYPRIAN5 citations84
US9634412B2Apr 25, 2017
Connector structures and methods
UZOH CYPRIAN3 citations73
US9142508B2Sep 22, 2015
Single exposure in multi-damascene process
UZOH CYPRIAN0 citations52
US8692118B2Apr 8, 2014
Reliable wire structure and method
UZOH CYPRIAN0 citations52