Inventor
SHI XIAOBO
US57 patents
⚠️ This page may combine multiple inventors who share the name “SHI XIAOBO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VERSUM MAT US LLC
20 patentsUS10465096B2Nov 5, 2019
Metal chemical mechanical planarization (CMP) composition and methods therefore
VERSUM MAT US LLC4 citations73
US11078417B2Aug 3, 2021
Low oxide trench dishing chemical mechanical polishing
VERSUM MAT US LLC2 citations72
US10253216B2Apr 9, 2019
Additives for barrier chemical mechanical planarization
VERSUM MAT US LLC4 citations71
US11401441B2Aug 2, 2022
Chemical mechanical planarization (CMP) composition and methods therefore for copper and through silica via (TSV) applications
VERSUM MAT US LLC4 citations66
US10920106B2Feb 16, 2021
Metal chemical mechanical planarization (CMP) composition and methods therefore
VERSUM MAT US LLC0 citations63
US12091581B2Sep 17, 2024
High oxide film removal rate shallow trench (STI) chemical mechanical planarization (CMP) polishing
VERSUM MAT US LLC0 citations62
US11692110B2Jul 4, 2023
Low oxide trench dishing chemical mechanical polishing
VERSUM MAT US LLC0 citations62
US11667839B2Jun 6, 2023
Low oxide trench dishing chemical mechanical polishing
VERSUM MAT US LLC0 citations62
US11608451B2Mar 21, 2023
Shallow trench isolation (STI) chemical mechanical planarization (CMP) polishing with tunable silicon oxide and silicon nitride removal rates
VERSUM MAT US LLC0 citations62
US11549034B2Jan 10, 2023
Oxide chemical mechanical planarization (CMP) polishing compositions
VERSUM MAT US LLC0 citations62
US11326076B2May 10, 2022
Shallow trench isolation (STI) chemical mechanical planarization (CMP) polishing with low abrasive concentration and a combination of chemical additives
VERSUM MAT US LLC0 citations62
US11104825B2Aug 31, 2021
Metal compound chemically anchored colloidal particles and methods of production and use thereof
VERSUM MAT US LLC0 citations62
US11072726B2Jul 27, 2021
Low oxide trench dishing chemical mechanical polishing
VERSUM MAT US LLC0 citations62
US11718767B2Aug 8, 2023
Chemical mechanical planarization composition for polishing oxide materials and method of use thereof
VERSUM MAT US LLC1 citations56
US11643599B2May 9, 2023
Tungsten chemical mechanical polishing for reduced oxide erosion
VERSUM MAT US LLC0 citations52
US12234383B2Feb 25, 2025
Low dishing oxide CMP polishing compositions for shallow trench isolation applications and methods of making thereof
VERSUM MAT US LLC0 citations51
US11254839B2Feb 22, 2022
Low oxide trench dishing shallow trench isolation chemical mechanical planarization polishing
VERSUM MAT US LLC0 citations51
US11180678B2Nov 23, 2021
Suppressing SiN removal rates and reducing oxide trench dishing for Shallow Trench Isolation (STI) process
VERSUM MAT US LLC0 citations51
US11066575B2Jul 20, 2021
Chemical mechanical planarization for tungsten-containing substrates
VERSUM MAT US LLC0 citations51
US10669449B2Jun 2, 2020
Composite abrasive particles for chemical mechanical planarization composition and method of use thereof
VERSUM MAT US LLC0 citations50
AIR PROD & CHEM
14 patentsUS9305806B2Apr 5, 2016
Chemical mechanical polishing slurry compositions and method using the same for copper and through-silicon via applications
AIR PROD & CHEM9 citations81
US8974692B2Mar 10, 2015
Chemical mechanical polishing slurry compositions and method using the same for copper and through-silicon via applications
AIR PROD & CHEM5 citations81
US8999193B2Apr 7, 2015
Chemical mechanical polishing composition having chemical additives and methods for using same
AIR PROD & CHEM10 citations79
US10032644B2Jul 24, 2018
Barrier chemical mechanical planarization slurries using ceria-coated silica abrasives
AIR PROD & CHEM5 citations72
US9978609B2May 22, 2018
Low dishing copper chemical mechanical planarization
AIR PROD & CHEM6 citations72
US10109493B2Oct 23, 2018
Composite abrasive particles for chemical mechanical planarization composition and method of use thereof
AIR PROD & CHEM1 citations61
US10570313B2Feb 25, 2020
Dishing reducing in tungsten chemical mechanical polishing
AIR PROD & CHEM1 citations59
US9062230B2Jun 23, 2015
Chemical mechanical polishing (CMP) composition for shallow trench isolation (STI) applications and methods of making thereof
AIR PROD & CHEM2 citations59
US8841216B2Sep 23, 2014
Method and composition for chemical mechanical planarization of a metal
AIR PROD & CHEM2 citations57
US9224614B2Dec 29, 2015
CMP slurry/method for polishing ruthenium and other films
AIR PROD & CHEM1 citations52
US10160884B2Dec 25, 2018
Metal compound chemically anchored colloidal particles and methods of production and use thereof
AIR PROD & CHEM0 citations51
US9574110B2Feb 21, 2017
Barrier chemical mechanical planarization composition and method thereof
AIR PROD & CHEM1 citations50
US10011741B2Jul 3, 2018
Chemical mechanical polishing (CMP) composition for shallow trench isolation (STI) applications and methods of making thereof
AIR PROD & CHEM0 citations49
US9305476B2Apr 5, 2016
Chemical mechanical polishing (CMP) composition for shallow trench isolation (STI) applications and methods of making thereof
AIR PROD & CHEM0 citations49
SHI XIAOBO
4 patentsUS8906123B2Dec 9, 2014
CMP slurry/method for polishing ruthenium and other films
SHI XIAOBO2 citations62
US8821751B2Sep 2, 2014
Chemical mechanical planarization composition and method with low corrosiveness
SHI XIAOBO0 citations51
US8551887B2Oct 8, 2013
Method for chemical mechanical planarization of a copper-containing substrate
SHI XIAOBO1 citations51
US8222145B2Jul 17, 2012
Method and composition for chemical mechanical planarization of a metal-containing substrate
SHI XIAOBO0 citations51
SPANSION LLC
4 patentsUS7633129B1Dec 15, 2009
Memory devices with active and passive layers having multiple self-assembled sublayers
SPANSION LLC2 citations62
US7208757B1Apr 24, 2007
Memory element with nitrogen-containing active layer
SPANSION LLC2 citations62
US7449742B2Nov 11, 2008
Memory device with active layer of dendrimeric material
SPANSION LLC4 citations61
US7307280B1Dec 11, 2007
Memory devices with active and passive doped sol-gel layers
SPANSION LLC0 citations52
GAUDIANA RUSSELL
3 patentsUS8563678B2Oct 22, 2013
Photovoltaic cell with thiazole-containing polymer
GAUDIANA RUSSELL1 citations62
US8058550B2Nov 15, 2011
Polymers with low band gaps and high charge mobility
GAUDIANA RUSSELL4 citations62
US8962783B2Feb 24, 2015
Photovoltaic cell with silole-containing polymer
GAUDIANA RUSSELL0 citations51
KONARKA TECHNOLOGIES INC
2 patentsEMAGIN CORP
1 patentMCCONNELL RACHEL DIANNE
1 patentMERCK PATENT GMBH
1 patentShowing the top 50 of 57 patents by PatentIndex Score.