P

Inventor

SHI XIAOBO

US57 patents
⚠️ This page may combine multiple inventors who share the name “SHI XIAOBO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VERSUM MAT US LLC

20 patents
US10465096B2Nov 5, 2019

Metal chemical mechanical planarization (CMP) composition and methods therefore

VERSUM MAT US LLC4 citations73
US11078417B2Aug 3, 2021

Low oxide trench dishing chemical mechanical polishing

VERSUM MAT US LLC2 citations72
US10253216B2Apr 9, 2019

Additives for barrier chemical mechanical planarization

VERSUM MAT US LLC4 citations71
US11401441B2Aug 2, 2022

Chemical mechanical planarization (CMP) composition and methods therefore for copper and through silica via (TSV) applications

VERSUM MAT US LLC4 citations66
US10920106B2Feb 16, 2021

Metal chemical mechanical planarization (CMP) composition and methods therefore

VERSUM MAT US LLC0 citations63
US12091581B2Sep 17, 2024

High oxide film removal rate shallow trench (STI) chemical mechanical planarization (CMP) polishing

VERSUM MAT US LLC0 citations62
US11692110B2Jul 4, 2023

Low oxide trench dishing chemical mechanical polishing

VERSUM MAT US LLC0 citations62
US11667839B2Jun 6, 2023

Low oxide trench dishing chemical mechanical polishing

VERSUM MAT US LLC0 citations62
US11608451B2Mar 21, 2023

Shallow trench isolation (STI) chemical mechanical planarization (CMP) polishing with tunable silicon oxide and silicon nitride removal rates

VERSUM MAT US LLC0 citations62
US11549034B2Jan 10, 2023

Oxide chemical mechanical planarization (CMP) polishing compositions

VERSUM MAT US LLC0 citations62
US11326076B2May 10, 2022

Shallow trench isolation (STI) chemical mechanical planarization (CMP) polishing with low abrasive concentration and a combination of chemical additives

VERSUM MAT US LLC0 citations62
US11104825B2Aug 31, 2021

Metal compound chemically anchored colloidal particles and methods of production and use thereof

VERSUM MAT US LLC0 citations62
US11072726B2Jul 27, 2021

Low oxide trench dishing chemical mechanical polishing

VERSUM MAT US LLC0 citations62
US11718767B2Aug 8, 2023

Chemical mechanical planarization composition for polishing oxide materials and method of use thereof

VERSUM MAT US LLC1 citations56
US11643599B2May 9, 2023

Tungsten chemical mechanical polishing for reduced oxide erosion

VERSUM MAT US LLC0 citations52
US12234383B2Feb 25, 2025

Low dishing oxide CMP polishing compositions for shallow trench isolation applications and methods of making thereof

VERSUM MAT US LLC0 citations51
US11254839B2Feb 22, 2022

Low oxide trench dishing shallow trench isolation chemical mechanical planarization polishing

VERSUM MAT US LLC0 citations51
US11180678B2Nov 23, 2021

Suppressing SiN removal rates and reducing oxide trench dishing for Shallow Trench Isolation (STI) process

VERSUM MAT US LLC0 citations51
US11066575B2Jul 20, 2021

Chemical mechanical planarization for tungsten-containing substrates

VERSUM MAT US LLC0 citations51
US10669449B2Jun 2, 2020

Composite abrasive particles for chemical mechanical planarization composition and method of use thereof

VERSUM MAT US LLC0 citations50

AIR PROD & CHEM

14 patents
US9305806B2Apr 5, 2016

Chemical mechanical polishing slurry compositions and method using the same for copper and through-silicon via applications

AIR PROD & CHEM9 citations81
US8974692B2Mar 10, 2015

Chemical mechanical polishing slurry compositions and method using the same for copper and through-silicon via applications

AIR PROD & CHEM5 citations81
US8999193B2Apr 7, 2015

Chemical mechanical polishing composition having chemical additives and methods for using same

AIR PROD & CHEM10 citations79
US10032644B2Jul 24, 2018

Barrier chemical mechanical planarization slurries using ceria-coated silica abrasives

AIR PROD & CHEM5 citations72
US9978609B2May 22, 2018

Low dishing copper chemical mechanical planarization

AIR PROD & CHEM6 citations72
US10109493B2Oct 23, 2018

Composite abrasive particles for chemical mechanical planarization composition and method of use thereof

AIR PROD & CHEM1 citations61
US10570313B2Feb 25, 2020

Dishing reducing in tungsten chemical mechanical polishing

AIR PROD & CHEM1 citations59
US9062230B2Jun 23, 2015

Chemical mechanical polishing (CMP) composition for shallow trench isolation (STI) applications and methods of making thereof

AIR PROD & CHEM2 citations59
US8841216B2Sep 23, 2014

Method and composition for chemical mechanical planarization of a metal

AIR PROD & CHEM2 citations57
US9224614B2Dec 29, 2015

CMP slurry/method for polishing ruthenium and other films

AIR PROD & CHEM1 citations52
US10160884B2Dec 25, 2018

Metal compound chemically anchored colloidal particles and methods of production and use thereof

AIR PROD & CHEM0 citations51
US9574110B2Feb 21, 2017

Barrier chemical mechanical planarization composition and method thereof

AIR PROD & CHEM1 citations50
US10011741B2Jul 3, 2018

Chemical mechanical polishing (CMP) composition for shallow trench isolation (STI) applications and methods of making thereof

AIR PROD & CHEM0 citations49
US9305476B2Apr 5, 2016

Chemical mechanical polishing (CMP) composition for shallow trench isolation (STI) applications and methods of making thereof

AIR PROD & CHEM0 citations49

SHI XIAOBO

4 patents

SPANSION LLC

4 patents

GAUDIANA RUSSELL

3 patents

KONARKA TECHNOLOGIES INC

2 patents

EMAGIN CORP

1 patent

MCCONNELL RACHEL DIANNE

1 patent

MERCK PATENT GMBH

1 patent

Showing the top 50 of 57 patents by PatentIndex Score.