Inventor

MURELLA KRISHNA

US3 patents

⚠️ This page may combine multiple inventors who share the name “MURELLA KRISHNA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AIR PROD & CHEM

2 patents

US9305806B2Apr 5, 2016

Chemical mechanical polishing slurry compositions and method using the same for copper and through-silicon via applications

AIR PROD & CHEM9 citations81

US8974692B2Mar 10, 2015

Chemical mechanical polishing slurry compositions and method using the same for copper and through-silicon via applications

AIR PROD & CHEM5 citations81

VERSUM MAT US LLC

1 patent

US12205061B2Jan 21, 2025

Shared data induced quality control for a chemical mechanical planarization process

VERSUM MAT US LLC0 citations46