Inventor
ANDERSON H ALEXANDER
US7 patents
⚠️ This page may combine multiple inventors who share the name “ANDERSON H ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMICONDUCTOR SYSTEMS INC
3 patentsUS5651823AJul 29, 1997
Clustered photolithography system
SEMICONDUCTOR SYSTEMS INC128 citations94
US5935768AAug 10, 1999
Method of processing a substrate in a photolithography system utilizing a thermal process module
SEMICONDUCTOR SYSTEMS INC40 citations91
US5553994ASep 10, 1996
Thermal process module for substrate coat/develop system
SEMICONDUCTOR SYSTEMS INC29 citations91