Inventor
GOESELE ULRICH
DE8 patents
⚠️ This page may combine multiple inventors who share the name “GOESELE ULRICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MAX PLANCK GESELLSCHAFT
3 patentsUS6589333B1Jul 8, 2003
Method for the manufacture of a substrate, substrate manufactured in accordance with this method, carrier wafer and diamond jewel
MAX PLANCK GESELLSCHAFT24 citations92
US6010591AJan 4, 2000
Method for the releasable bonding and subsequent separation of reversibly bonded and polished wafers and also a wafer structure and wafer
MAX PLANCK GESELLSCHAFT48 citations91
US5985412ANov 16, 1999
Method of manufacturing microstructures and also microstructure
MAX PLANCK GESELLSCHAFT43 citations91