Inventor

BARTY ANTON

AU3 patents

⚠️ This page may combine multiple inventors who share the name “BARTY ANTON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNIV MELBOURNE

2 patents

US6885442B1Apr 26, 2005

Phase determination of a radiation wave field

UNIV MELBOURNE20 citations87

US7039553B2May 2, 2006

Phase determination of a radiation wave field

UNIV MELBOURNE12 citations79

EUV LLC

1 patent

US7022435B2Apr 4, 2006

Method for the manufacture of phase shifting masks for EUV lithography

EUV LLC4 citations61