Inventor

HSU GISHUN

US4 patents

⚠️ This page may combine multiple inventors who share the name “HSU GISHUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

2 patents

US7955990B2Jun 7, 2011

Method for improved thickness repeatability of PECVD deposited carbon films

NOVELLUS SYSTEMS INC26 citations89

US7820556B2Oct 26, 2010

Method for purifying acetylene gas for use in semiconductor processes

NOVELLUS SYSTEMS INC32 citations89

HSU GISHUN

1 patent

US8309473B2Nov 13, 2012

Method for purifying acetylene gas for use in semiconductor processes

HSU GISHUN20 citations86

LAM RES CORP

1 patent

US12394608B2Aug 19, 2025

Cleaning system for removing deposits from pump in an exhaust of a substrate processing system

LAM RES CORP0 citations50