P

Inventor

MIYAMOTO TETSUSHI

JP5 patents
⚠️ This page may combine multiple inventors who share the name “MIYAMOTO TETSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents
US7927657B2Apr 19, 2011

Liquid processing apparatus and liquid processing method

TOKYO ELECTRON LTD12 citations82
US7615117B2Nov 10, 2009

Coating and processing apparatus and method

TOKYO ELECTRON LTD10 citations82
US7566365B2Jul 28, 2009

Liquid processing apparatus and liquid processing method

TOKYO ELECTRON LTD15 citations82

KOBAYASHI SHINJI

1 patent
US8277884B2Oct 2, 2012

Coating and processing apparatus and method

KOBAYASHI SHINJI5 citations60

SATO NORIFUMI

1 patent
US8518480B2Aug 27, 2013

Developing treatment method, program, computer storage medium and developing treatment system

SATO NORIFUMI0 citations32