Inventor

NOMURA HISASHI

JP6 patents

⚠️ This page may combine multiple inventors who share the name “NOMURA HISASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

2 patents

US6787481B2Sep 7, 2004

Method for manufacturing semiconductor device

HITACHI INT ELECTRIC INC29 citations91

US6821871B2Nov 23, 2004

Method for manufacturing semiconductor device, substrate treatment method, and semiconductor manufacturing apparatus

HITACHI INT ELECTRIC INC1 citations51

CHIYODA CORP

2 patents

US7943115B2May 17, 2011

Porous 4 group metal oxide and method for preparation thereof

CHIYODA CORP4 citations58

US7691781B2Apr 6, 2010

Layered porous titanium oxide, process for producing the same, and catalyst comprising the same

CHIYODA CORP2 citations58

KOKUSAI ELECTRIC CO LTD

1 patent

US5960159ASep 28, 1999

Heat treatment of semiconductor wafers where upper heater directly heats upper wafer in its entirety and lower heater directly heats lower wafer in its entirety

KOKUSAI ELECTRIC CO LTD37 citations91

TAKESHIMA YUICHIRO

1 patent

US9023429B2May 5, 2015

Method of manufacturing semiconductor device and substrate processing apparatus

TAKESHIMA YUICHIRO4 citations66