Inventor
ROELOFS ROBIN
BE4 patents
Patents
4 patentsUS9552979B2Jan 24, 2017
Cyclic aluminum nitride deposition in a batch reactor
ASM IP HOLDING BV43 citations92
US9520562B2Dec 13, 2016
Method of making a resistive random access memory
ASM IP HOLDING BV7 citations83
US9472757B2Oct 18, 2016
Method of making a resistive random access memory device
ASM IP HOLDING BV3 citations72
US12195852B2Jan 14, 2025
Substrate processing apparatus with an injector
ASM IP HOLDING BV0 citations50