Inventor
BAIER JUERGEN
DE7 patents
⚠️ This page may combine multiple inventors who share the name “BAIER JUERGEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
6 patentsUS10514608B2Dec 24, 2019
Method for producing an illumination system for an EUV projection exposure system, and illumination system
ZEISS CARL SMT GMBH4 citations68
US12346033B2Jul 1, 2025
Optical system
ZEISS CARL SMT GMBH0 citations60
US10386733B2Aug 20, 2019
Optical system
ZEISS CARL SMT GMBH1 citations60
US11048172B2Jun 29, 2021
Method for producing an illumination system for an EUV projection exposure system, and illumination system
ZEISS CARL SMT GMBH0 citations58
US10345547B2Jul 9, 2019
Method for producing a lens for a lithography apparatus, and measurement system
ZEISS CARL SMT GMBH0 citations50
US9213245B2Dec 15, 2015
Optical system and multi facet mirror of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH1 citations50