Inventor
SUZUKI TAKEFUMI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “SUZUKI TAKEFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
4 patentsUS10121676B2Nov 6, 2018
Interconnects fabricated by hydrofluorocarbon gas-assisted plasma etch
IBM2 citations73
US10643859B2May 5, 2020
Hydrofluorocarbon gas-assisted plasma etch for interconnect fabrication
IBM0 citations52
US10304692B1May 28, 2019
Method of forming field effect transistor (FET) circuits, and forming integrated circuit (IC) chips with the FET circuits
IBM0 citations52
US9934984B2Apr 3, 2018
Hydrofluorocarbon gas-assisted plasma etch for interconnect fabrication
IBM0 citations52