Inventor
MARTH BEAU
US5 patents
Patents
5 patentsUS11244841B2Feb 8, 2022
Systems for integrated decomposition and scanning of a semiconducting wafer
ELEMENTAL SCIENTIFIC INC8 citations84
US11049741B2Jun 29, 2021
Systems for integrated decomposition and scanning of a semiconducting wafer
ELEMENTAL SCIENTIFIC INC8 citations83
US11804390B2Oct 31, 2023
Systems for integrated decomposition and scanning of a semiconducting wafer
ELEMENTAL SCIENTIFIC INC1 citations72
US11705351B2Jul 18, 2023
Systems for integrated decomposition and scanning of a semiconducting wafer
ELEMENTAL SCIENTIFIC INC1 citations72
US11476134B2Oct 18, 2022
Systems for integrated decomposition and scanning of a semiconducting wafer
ELEMENTAL SCIENTIFIC INC1 citations72