Inventor
ROCKWELL TYLER
US12 patents
⚠️ This page may combine multiple inventors who share the name “ROCKWELL TYLER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS11056319B2Jul 6, 2021
Apparatus and system having extraction assembly for wide angle ion beam
APPLIED MATERIALS INC5 citations69
USD1120442SMar 24, 2026
Ion extraction optics having novel blocker configuration
APPLIED MATERIALS INC0 citations60
US12400824B2Aug 26, 2025
Ion extraction optics having novel blocker configuration
APPLIED MATERIALS INC0 citations60
US12106943B2Oct 1, 2024
Substrate halo arrangement for improved process uniformity
APPLIED MATERIALS INC0 citations50
US12191117B2Jan 7, 2025
Compact low angle ion beam extraction assembly and processing apparatus
APPLIED MATERIALS INC0 citations46
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
4 patentsUS9514912B2Dec 6, 2016
Control of ion angular distribution of ion beams with hidden deflection electrode
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC9 citations83
US10224181B2Mar 5, 2019
Radio frequency extraction system for charge neutralized ion beam
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3 citations72
US9865433B1Jan 9, 2018
Gas injection system for ion beam device
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations71
US10193066B2Jan 29, 2019
Apparatus and techniques for anisotropic substrate etching
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations43
VARIAN SEMICONDUCTOR EQUIPMENT
3 patentsUS7723697B2May 25, 2010
Techniques for optical ion beam metrology
VARIAN SEMICONDUCTOR EQUIPMENT4 citations60
US8698108B1Apr 15, 2014
Ion beam measurement system and method
VARIAN SEMICONDUCTOR EQUIPMENT1 citations46
US8907300B2Dec 9, 2014
System and method for plasma control using boundary electrode
VARIAN SEMICONDUCTOR EQUIPMENT0 citations41