Inventor
LU SHENG-HSUN
TW3 patents
Patents
3 patentsUS11814731B2Nov 14, 2023
Semiconductor tool having controllable ambient environment processing zones
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations70
US12398468B2Aug 26, 2025
Semiconductor tool having controllable ambient environment processing zones
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11047050B2Jun 29, 2021
Semiconductor tool having controllable ambient environment processing zones
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59