Inventor
HARVELL JOHN T
5 patents
Patents
5 patentsUS4918930AApr 24, 1990
Electronically controlled cryopump
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US5157928AOct 27, 1992
Electronically controlled cryopump
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US5156007AOct 20, 1992
Cryopump with improved second stage passageway
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US4259844AApr 7, 1981
Stacked disc heat exchanger for refrigerator cold finger
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US4860546AAug 29, 1989
Vacuum system with molecular flow line
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