P

Inventor

KAWANO HAJIME

JP86 patents
⚠️ This page may combine multiple inventors who share the name “KAWANO HAJIME”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

28 patents
US9236220B2Jan 12, 2016

Electronic microscope, setting method of observation condition of electronic microscope, and observation method using electronic microscope

HITACHI HIGH TECH CORP8 citations84
US9177759B2Nov 3, 2015

Processing apparatus and method using a scanning electron microscope

HITACHI HIGH TECH CORP16 citations84
US8618499B1Dec 31, 2013

Electron beam irradiation apparatus

HITACHI HIGH TECH CORP6 citations84
US10720306B2Jul 21, 2020

Charged particle beam device

HITACHI HIGH TECH CORP4 citations83
US10249474B2Apr 2, 2019

Charged particle beam device

HITACHI HIGH TECH CORP4 citations83
US9697987B2Jul 4, 2017

Charged particle beam device

HITACHI HIGH TECH CORP9 citations83
US8890096B2Nov 18, 2014

Measuring/inspecting apparatus and measuring/inspecting method enabling blanking control of electron beam

HITACHI HIGH TECH CORP8 citations82
US11062892B2Jul 13, 2021

Charged particle detector including a light-emitting section having lamination structure, charged particle beam device, and mass spectrometer

HITACHI HIGH TECH CORP3 citations73
US10546718B2Jan 28, 2020

High voltage power supply device and charged particle beam device

HITACHI HIGH TECH CORP2 citations73
US10134558B2Nov 20, 2018

Scanning electron microscope

HITACHI HIGH TECH CORP2 citations73
US9679740B2Jun 13, 2017

Charged particle beam device

HITACHI HIGH TECH CORP2 citations73
US9543053B2Jan 10, 2017

Electron beam equipment

HITACHI HIGH TECH CORP3 citations73
US9368324B2Jun 14, 2016

Measurement and inspection device

HITACHI HIGH TECH CORP4 citations73
US9336984B2May 10, 2016

Charged particle beam device and measuring method using the same

HITACHI HIGH TECH CORP6 citations73
US9053905B2Jun 9, 2015

Electron beam irradiation apparatus

HITACHI HIGH TECH CORP4 citations73
US11133147B2Sep 28, 2021

Charged particle ray device and cross-sectional shape estimation program

HITACHI HIGH TECH CORP2 citations72
US10903037B2Jan 26, 2021

Charged particle beam device

HITACHI HIGH TECH CORP2 citations72
US10818470B2Oct 27, 2020

Charged particle beam device

HITACHI HIGH TECH CORP2 citations72
US9978558B2May 22, 2018

Scanning-electron-microscope image processing device and scanning method

HITACHI HIGH TECH CORP4 citations72
US9644955B2May 9, 2017

Scanning electron beam device with focus adjustment based on acceleration voltage and dimension measurement method using same

HITACHI HIGH TECH CORP2 citations72
US9520266B2Dec 13, 2016

Pattern critical dimension measurement equipment and method for measuring pattern critical dimension

HITACHI HIGH TECH CORP4 citations72
US10121634B2Nov 6, 2018

Charged particle beam device and charged particle beam measurement method

HITACHI HIGH TECH CORP2 citations71
US12394586B2Aug 19, 2025

Charged particle beam device

HITACHI HIGH TECH CORP0 citations62
US12205790B2Jan 21, 2025

Charged particle beam device

HITACHI HIGH TECH CORP0 citations62
US12125667B2Oct 22, 2024

Charged particle beam device

HITACHI HIGH TECH CORP0 citations62
US12057288B2Aug 6, 2024

Charged particle beam device and inspection method

HITACHI HIGH TECH CORP0 citations62
US11798780B2Oct 24, 2023

Charged particle beam device

HITACHI HIGH TECH CORP0 citations62
US11239052B2Feb 1, 2022

Charged particle beam device

HITACHI HIGH TECH CORP0 citations62

HITACHI MEDICAL CORP

9 patents

HITACHI LTD

4 patents

PANASONIC CORP

3 patents

KITANO YUKIHIKO

2 patents

OTAKA TADASHI

1 patent

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

1 patent

KAWANO HAJIME

1 patent

MITSUBISHI ELECTRIC CORP

1 patent

Showing the top 50 of 86 patents by PatentIndex Score.