Inventor
KESARI SUSRUT
US5 patents
Patents
5 patentsUS6884338B2Apr 26, 2005
Methods for polishing and/or cleaning copper interconnects and/or film and compositions therefor
3M INNOVATIVE PROPERTIES CO26 citations91
US6858124B2Feb 22, 2005
Methods for polishing and/or cleaning copper interconnects and/or film and compositions therefor
3M INNOVATIVE PROPERTIES CO34 citations91
US6394107B1May 28, 2002
Use of fluorinated ketones as wet cleaning agents for vapor reactors and vapor reactor components
3M INNOVATIVE PROPERTIES CO42 citations90
US7147767B2Dec 12, 2006
Plating solutions for electrochemical or chemical deposition of copper interconnects and methods therefor
3M INNOVATIVE PROPERTIES CO7 citations72
US6540930B2Apr 1, 2003
Use of perfluoroketones as vapor reactor cleaning, etching, and doping gases
3M INNOVATIVE PROPERTIES CO8 citations71