Inventor

NEE JOCELYN T

US2 patents

Patents

2 patents

US6758983B2Jul 6, 2004

Staggered torsional electrostatic combdrive and method of forming same

UNIV CALIFORNIA69 citations94

US7079299B1Jul 18, 2006

Staggered torsional electrostatic combdrive and method of forming same

UNIV CALIFORNIA35 citations90