Inventor

ECKES WILLIAM A

US7 patents

⚠️ This page may combine multiple inventors who share the name “ECKES WILLIAM A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PERKIN ELMER CORP

2 patents

US4412133AOct 25, 1983

Electrostatic cassette

PERKIN ELMER CORP376 citations93

US4788431ANov 29, 1988

Specimen distance measuring system

PERKIN ELMER CORP21 citations80

APPLIED MATERIALS INC

2 patents

US7345287B2Mar 18, 2008

Cooling module for charged particle beam column elements

APPLIED MATERIALS INC11 citations82

US7336369B2Feb 26, 2008

Multi-axis interferometer system using independent, single axis interferometers

APPLIED MATERIALS INC14 citations81

ETEC SYSTEMS INC

1 patent

US6219146B1Apr 17, 2001

Laser reflector alignment

ETEC SYSTEMS INC11 citations72

ETEC SYSTEM INC

1 patent

US5209402AMay 11, 1993

Laminar flow gas diffuser

ETEC SYSTEM INC16 citations68

ECKES WILLIAM A

1 patent

US7518732B2Apr 14, 2009

Multi-axis interferometer system using independent, single axis interferometers

ECKES WILLIAM A1 citations43