Inventor
VAN BRAGT ERIK JOHANNUS JOSEPH
NL2 patents
Patents
2 patentsUS7113254B2Sep 26, 2006
Lithographic projection apparatus, gas purging method, device manufacturing method, and purge gas supply system
ASML NETHERLANDS BV15 citations89
US7450215B2Nov 11, 2008
Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system
ASML NETHERLANDS BV1 citations57