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Inventor
BUSCH JENS
DE
2 patents
⚠️ This page may combine multiple inventors who share the name “BUSCH JENS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BARLOVIC ROBERT
1 patent
US8155770B2
Apr 10, 2012
Method and apparatus for dispatching workpieces to tools based on processing and performance history
BARLOVIC ROBERT
6 citations
62
ADVANCED MICRO DEVICES INC
1 patent
US8039181B2
Oct 18, 2011
Method and system for reducing overlay errors in semiconductor volume production using a mixed tool scenario
ADVANCED MICRO DEVICES INC
5 citations
59