Inventor
LEHMANN JOHN FRANCIS
US5 patents
⚠️ This page may combine multiple inventors who share the name “LEHMANN JOHN FRANCIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VERSUM MAT US LLC
4 patentsUS11268190B2Mar 8, 2022
Processes for depositing silicon-containing films using halidosilane compounds
VERSUM MAT US LLC2 citations71
US10106890B2Oct 23, 2018
Compositions and methods using same for deposition of silicon-containing film
VERSUM MAT US LLC3 citations71
US12049695B2Jul 30, 2024
Compositions and methods using same for deposition of silicon-containing film
VERSUM MAT US LLC0 citations61
US11913112B2Feb 27, 2024
Processes for depositing silicon-containing films using halidosilane compounds and compositions
VERSUM MAT US LLC0 citations60