Inventor
TSYRULIN KATJA
DE2 patents
Patents
2 patentsUS9251997B2Feb 2, 2016
Method for processing and/or for observing an object, and particle beam device for carrying out the method
ZEISS CARL MICROSCOPY GMBH2 citations57
US9685300B2Jun 20, 2017
Method for processing and/or for observing an object, and particle beam device for carrying out the method
ZEISS CARL MICROSCOPY GMBH1 citations46