Inventor
SALZER ROLAND
DE4 patents
Patents
4 patentsUS9251997B2Feb 2, 2016
Method for processing and/or for observing an object, and particle beam device for carrying out the method
ZEISS CARL MICROSCOPY GMBH2 citations57
US9685300B2Jun 20, 2017
Method for processing and/or for observing an object, and particle beam device for carrying out the method
ZEISS CARL MICROSCOPY GMBH1 citations46
US9960012B2May 1, 2018
Method for structuring an object and associated particle beam system
ZEISS CARL MICROSCOPY GMBH0 citations37
US9543117B2Jan 10, 2017
Method of processing a material-specimen
ZEISS CARL MICROSCOPY GMBH0 citations33