Inventor

WU MIAO-CHAN

TW2 patents

Patents

2 patents

US9855575B2Jan 2, 2018

Gas injector and cover plate assembly for semiconductor equipment

HERMES-EPITEK CORP1 citations46

US9427762B2Aug 30, 2016

Gas injector and cover plate assembly for semiconductor equipment

HERMES-EPITEK CORP0 citations46