Inventor
OONO SHIGEMI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “OONO SHIGEMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
2 patentsUS9799540B2Oct 24, 2017
Liquid processing apparatus, liquid processing method and storage medium
TOKYO ELECTRON LTD8 citations78
US12243758B2Mar 4, 2025
Monitoring system for a sealing apparatus having a substrate treatment apparatus in a housing utilizing a laser sensor installed in a space between the housing and the substrate treatment apparatus and that scans a detection region therein
TOKYO ELECTRON LTD0 citations44