Inventor
LU LIN-CHEN
TW3 patents
Patents
3 patentsUS11855137B2Dec 26, 2023
SOI device structure for robust isolation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11257902B2Feb 22, 2022
SOI device structure for robust isolation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12476137B2Nov 18, 2025
Method to enlarge an opening in air gap formation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57