Inventor
CHU ZHENMING
CN3 patents
Patents
3 patentsUS11298727B2Apr 12, 2022
Substrate cleaning apparatus
ACM RESEARCH SHANGHAI INC0 citations60
US10770315B2Sep 8, 2020
Fall-proof apparatus for cleaning semiconductor devices and a chamber with the apparatus
ACM RESEARCH SHANGHAI INC0 citations50
US12518961B2Jan 6, 2026
Wafer backside cleaning method
ACM RESEARCH SHANGHAI INC0 citations45