Inventor

ITOH JUNJU

JP2 patents

Patents

2 patents

US5594166AJan 14, 1997

Cantilever for use with atomic force microscope and process for the production thereof

EBARA RES CO LTD15 citations78

US5614663AMar 25, 1997

Cantilever for use with atomic force microscope and process for the production thereof

EBARA RES CO LTD8 citations69