Inventor
KOBATA ITSUKI
JP41 patents
⚠️ This page may combine multiple inventors who share the name “KOBATA ITSUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
36 patentsUS6743349B2Jun 1, 2004
Electrochemical machining method and apparatus
EBARA CORP26 citations92
US11450544B2Sep 20, 2022
Substrate processing apparatus, substrate processing system, and substrate processing method
EBARA CORP8 citations86
US10665487B2May 26, 2020
Substrate processing apparatus, substrate processing system, and substrate processing method
EBARA CORP8 citations84
US9700988B2Jul 11, 2017
Substrate processing apparatus
EBARA CORP8 citations84
US7208076B2Apr 24, 2007
Substrate processing apparatus and method
EBARA CORP10 citations83
US7101465B2Sep 5, 2006
Electrolytic processing device and substrate processing apparatus
EBARA CORP14 citations83
US10201888B2Feb 12, 2019
Substrate processing apparatus
EBARA CORP3 citations73
US7255778B2Aug 14, 2007
Electrochemical machining method and apparatus
EBARA CORP6 citations73
US11926018B2Mar 12, 2024
Apparatus for polishing and method of polishing
EBARA CORP3 citations71
US12350787B2Jul 8, 2025
Substrate processing apparatus
EBARA CORP0 citations62
US12062563B2Aug 13, 2024
Substrate processing apparatus, substrate processing system, and substrate processing method
EBARA CORP0 citations62
US11731240B2Aug 22, 2023
Substrate processing apparatus
EBARA CORP0 citations62
US10792782B2Oct 6, 2020
Polishing-amount simulation method for buffing, and buffing apparatus
EBARA CORP1 citations62
US10183374B2Jan 22, 2019
Buffing apparatus, and substrate processing apparatus
EBARA CORP1 citations62
US7960188B2Jun 14, 2011
Polishing method
EBARA CORP3 citations62
US7655118B2Feb 2, 2010
Electrolytic processing apparatus and method
EBARA CORP4 citations62
US7638030B2Dec 29, 2009
Electrolytic processing apparatus and electrolytic processing method
EBARA CORP3 citations62
US7527723B2May 5, 2009
Electrolytic processing apparatus and electrolytic processing method
EBARA CORP2 citations62
US7427345B2Sep 23, 2008
Method and device for regenerating ion exchanger, and electrolytic processing apparatus
EBARA CORP3 citations62
US12033847B2Jul 9, 2024
Cleaning module, substrate processing apparatus including cleaning module, and cleaning method
EBARA CORP0 citations57
US11980998B2May 14, 2024
Polishing device, polishing method, and recording medium for recording program for determining supply position of polishing liquid
EBARA CORP0 citations52
US11839948B2Dec 12, 2023
Polishing apparatus
EBARA CORP0 citations52
US11673222B2Jun 13, 2023
Polishing head system and polishing apparatus
EBARA CORP0 citations52
US11465254B2Oct 11, 2022
Polishing machine and a polishing method for a substrate
EBARA CORP0 citations52
US11192216B2Dec 7, 2021
Polishing method and polishing apparatus
EBARA CORP0 citations52
US11069563B2Jul 20, 2021
Method for processing substrate and substrate processing apparatus
EBARA CORP0 citations52
US10343255B2Jul 9, 2019
Polishing apparatus
EBARA CORP0 citations52
US10131030B2Nov 20, 2018
Buffing apparatus and substrate processing apparatus
EBARA CORP0 citations52
US9969048B2May 15, 2018
Polishing apparatus
EBARA CORP0 citations52
US7569135B2Aug 4, 2009
Electrolytic processing apparatus and substrate processing apparatus and method
EBARA CORP0 citations52
US12017323B2Jun 25, 2024
Polishing head system and polishing apparatus
EBARA CORP0 citations51
US7578920B2Aug 25, 2009
Electrolytic processing method
EBARA CORP1 citations51
US12179312B2Dec 31, 2024
Apparatus for polishing, processing system, and method of polishing
EBARA CORP0 citations50
US12154797B2Nov 26, 2024
Substrate processing method and substrate processing apparatus
EBARA CORP0 citations49
US7476303B2Jan 13, 2009
Electrolytic processing apparatus and electrolytic processing method
EBARA CORP0 citations41
US10556314B2Feb 11, 2020
Head height adjustment device and substrate processing apparatus provided with head height adjustment device
EBARA CORP0 citations39