Inventor
TOYOMURA NAOKI
JP14 patents
Patents
14 patentsUS9700988B2Jul 11, 2017
Substrate processing apparatus
EBARA CORP8 citations84
USD790489SJun 27, 2017
Vacuum contact pad
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US10201888B2Feb 12, 2019
Substrate processing apparatus
EBARA CORP3 citations73
USD795315SAug 22, 2017
Dresser disk
EBARA CORP5 citations73
US9673067B2Jun 6, 2017
Substrate processing apparatus and processed substrate manufacturing method
EBARA CORP3 citations72
US12350787B2Jul 8, 2025
Substrate processing apparatus
EBARA CORP0 citations62
US11731240B2Aug 22, 2023
Substrate processing apparatus
EBARA CORP0 citations62
US11103972B2Aug 31, 2021
Buff processing device and substrate processing device
EBARA CORP0 citations62
US10898987B2Jan 26, 2021
Table for holding workpiece and processing apparatus with the table
EBARA CORP0 citations62
US11846536B2Dec 19, 2023
Sensor target cover used in combination with liquid level detection sensor, wet processing device, substrate processing device, and sensor assembly
EBARA CORP0 citations51
US11195736B2Dec 7, 2021
Substrate processing apparatus, method of detaching substrate from vacuum suction table of substrate processing apparatus, and method of placing substrate onto vacuum suction table of substrate processing apparatus
EBARA CORP0 citations51
US10438820B2Oct 8, 2019
Substrate processing apparatus, discharge method, and program
EBARA CORP0 citations51
US10847407B2Nov 24, 2020
Substrate holding apparatus
EBARA CORP0 citations41
US10121692B2Nov 6, 2018
Substrate holding apparatus
EBARA CORP0 citations41