Inventor
CHANG CHI-WEI
TW13 patents
⚠️ This page may combine multiple inventors who share the name “CHANG CHI-WEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
4 patentsUS6062084AMay 16, 2000
Apparatus for detecting wafer edge defects and method of using
TAIWAN SEMICONDUCTOR MFG62 citations95
US6542839B1Apr 1, 2003
Apparatus and method for calibrating the position of a cassette indexer
TAIWAN SEMICONDUCTOR MFG20 citations90
US6422610B1Jul 23, 2002
Deformable fluid supply line
TAIWAN SEMICONDUCTOR MFG19 citations82
US6627527B1Sep 30, 2003
Method to reduce metal silicide void formation
TAIWAN SEMICONDUCTOR MFG15 citations78