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Inventor
HINOMURA TORU
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “HINOMURA TORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PANASONIC CORP
2 patents
US8344508B2
Jan 1, 2013
Semiconductor device and fabrication method thereof
PANASONIC CORP
13 citations
79
US8895431B2
Nov 25, 2014
Method for fabricating semiconductor device
PANASONIC CORP
6 citations
69
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
2 patents
US6746962B2
Jun 8, 2004
Method for fabricating a semi-conductor device having a tungsten film-filled via hole
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
3 citations
57
US7233073B2
Jun 19, 2007
Semiconductor device and method for fabricating the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
1 citations
50